Hi,
I think you can refer this paper by M. Hirose et al...In this paper, there was an analysis of Si-O-Si vibration from ATR result. I think the number of wavenumbers of FTIR and ATR is similar around 1220cm-1.
Microelectronic Engineering 22 (1993) 3-10
Elsevier
Ultra-Thin Gate Oxide Growth on...