Recent content by mama79

  1. M

    Silicon Dioxide (SiO2) FTIR peaks

    Hi, I think you can refer this paper by M. Hirose et al...In this paper, there was an analysis of Si-O-Si vibration from ATR result. I think the number of wavenumbers of FTIR and ATR is similar around 1220cm-1. Microelectronic Engineering 22 (1993) 3-10 Elsevier Ultra-Thin Gate Oxide Growth on...
  2. M

    What is the activation energy of SiO2 oxidation?

    Thank you very much.. So far, I have difficulties to extract the parabolic constant and intercept of the graph (t/xo+t1) vs xo), where t is oxidation time, xo is thickness and t1 is the time value after extrapolating the curve of oxidation time vs thickness (refer to deal and grove) model. This...
  3. M

    What is the activation energy of SiO2 oxidation?

    Hi.. How to calculate the activation energy of oxidation of Si. For example, from the Arrhenius plot (parabolic constant versus 1000/T (K-1)).
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