Recent content by mocaliber

oh, sorry for my ambiguous description! The free-standing structure I meant is like this picture. My problem is that how can I get such structure with KOH as etchant. And my wafer is SiO2. Thanks for your reply!

Hi, Though this may be a basic technique, I would like to know how to make a free standing structure. Most of the papers use KOH as etchant to etch SiO2 and then get such structure. And I think besides putting SiO2 into the etchant, there should be some other things work with this...