Plasma colour in a sputtering chamber


by teoporta
Tags: chamber, colour, plasma, sputtering
teoporta
teoporta is offline
#1
Nov21-12, 01:42 AM
P: 2
Hi everyone,
my question is: what information can someone get by just looking at the colour of a plasma?
I the elements inside the chambers, together with some(few) common impurities.

Using the common spontaneous emission formula i can guess what transition emitted light with a particular frequency, but i don't have any database to make that data meaningful...

thank you
Phys.Org News Partner Physics news on Phys.org
Researchers develop scalable methods for manufacturing metamaterials
Researchers find tin selenide shows promise for efficiently converting waste heat into electrical energy
After 13 years, progress in pitch-drop experiment (w/ video)
Astronuc
Astronuc is offline
#2
Nov21-12, 06:15 AM
Admin
Astronuc's Avatar
P: 21,634
Quote Quote by teoporta View Post
Hi everyone,
my question is: what information can someone get by just looking at the colour of a plasma?
I the elements inside the chambers, together with some(few) common impurities.

Using the common spontaneous emission formula i can guess what transition emitted light with a particular frequency, but i don't have any database to make that data meaningful...

thank you
Inductively-coupled plasma optical emission spectroscopy is a common method for analyzing elements in a material.

http://www.wfu.edu/chemistry/courses...icpreprint.pdf

One would need to calibrate one's system with a standard. One usually uses a standard obtained NIST.

There are other techniques for surface analysis:
http://www.chem.qmul.ac.uk/surfaces/scc/
ZapperZ
ZapperZ is offline
#3
Nov21-12, 11:36 AM
Mentor
ZapperZ's Avatar
P: 28,801
Actually, I'm not sure if you can make such analysis of the glow in a plasma used for sputtering.

In a reactive sputtering where the sputtered specie react with a gas that has been backfilled, you can tell the difference in the color between reactive and non-reactive, i.e. you detect a qualitative difference. However, whether you can make elemental analysis from the color, that I haven't seen done before.

Zz.

teoporta
teoporta is offline
#4
Nov21-12, 09:23 PM
P: 2

Plasma colour in a sputtering chamber


I see. Thank you for both your answers.
In my case it's normal magnetron sputtering.
Can a different amount of oxigen in the chamber change the colour of the plasma?
I'm sputtering using a Ti target:
If plasma is green it forms a Ti film, if it's light blue it forms TiO2 film...


Register to reply

Related Discussions
Plasma Based Chamber General Engineering 3
In a magnetic confinement fusion reactor chamber, how does the gas turn into plasma? Classical Physics 3
precombustion chamber and compression chamber Mechanical Engineering 1
Argon sputtering onto Al(111) Advanced Physics Homework 0
What is plasma sputtering?? General Physics 8