Thanks f95toli, I tried to find more material using Van der Pauw measurement for dielectric constant, but I could not find. Please let me know if you can get any reference. I really appreciate your help.
Thanks.
Hi,
I have deposited a film of dielectric on SiO2 substrate. Then, deposited metal dots on the top of dielectric film to measure electrical properties. I want to measure capacitance using metal dots on the top of dielectric. Since I have SiO2 as a substrate, I can not make a parallel plate...