Recent content by xlee790

Modey3, Let me summarize what you have said: 1) It's possible to make the wafer surface positively charged by flooding 2) It is the Flooding/Primary Beam that makes the wafer surface positively/negatively charged rather than bias that applied to the wafer stage. 3) Stage bias will not...

Thanks for correcting me... But the primary beam energy(PBE) can be tuned, SE Yield is a function of PBE, so SE yield <1 is still possible ? Yes, for review SEM, the stage is always grouned. The tool I operate is an inspection SEM, for which flooding is used to make the electrons more...

Thanks modey3 for your detailed answers, But I think although Secondary Electrons (SE) are knocked out of the wafer surface, there are great amount of "new" electrons emitting from the gun impinge on the wafer that will compensate the loss of SE's. So there are two situations: a) SE...

I have two questions about SEM which is in the attachment, need your instructions...thanks in advance..