Coating Hollow Shapes w/ Vacuum Evap: Atom vs Ion?

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Discussion Overview

The discussion revolves around the feasibility of using vacuum evaporation, sputtering, and ion plating processes to coat the interior surfaces of hollow shapes. Participants explore the nature of the ejected materials, questioning whether they are atoms or ions and how this affects the coating process.

Discussion Character

  • Exploratory
  • Technical explanation
  • Debate/contested

Main Points Raised

  • One participant questions the ability of atoms to travel to the substrate without charge, seeking clarification on the nature of the ejected materials in vacuum processes.
  • Another participant acknowledges the technical challenges associated with coating hollow shapes, noting that most vacuum deposition techniques are line of sight.
  • There is a suggestion that Chemical Vapor Deposition (CVD) could be a viable alternative for coating.
  • A later reply proposes Atomic Layer Deposition (ALD) as the best choice for this application.

Areas of Agreement / Disagreement

Participants express differing views on the methods and challenges of coating hollow shapes, with no consensus reached on the best approach or the nature of the ejected materials.

Contextual Notes

The discussion highlights limitations in available literature regarding the nature of material ejection in vacuum processes and the specific challenges of coating non-line-of-sight surfaces.

kelvin490
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Is it possible to use vacuum evaporation, sputtering and ion plating processes to coat the inside walls of holes and other hollow shapes of substrates? I wonder whether the source materials are ejected in the form of atoms or ions? Many books say atom but how can they travel to the substrate if they don't have charge?

I have looked for several textbooks but cannot get a confirmed answer.
 
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Thanks for the post! Sorry you aren't generating responses at the moment. Do you have any further information, come to any new conclusions or is it possible to reword the post?
 
Yes, but lots of technical challenges. Most vacuum deposited coating are line of sight, but lots of ways to skin a cat.

CVD might be considered.

Your question on ions or atoms, which process type? Fundamental are available in all over the place.
 
ALD is the best choice.
 

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