SUMMARY
The discussion focuses on determining the quality factor (Q) of a piezoelectric rectangular plate MEMS resonator using COMSOL Multiphysics 4.0a. The user is modeling mechanical oscillations and has successfully identified the desired eigenmode but struggles with calculating Q due to obtaining purely imaginary eigenvalues (λ), indicating an infinite Q. The user seeks guidance on defining damping parameters within the COMSOL environment to achieve accurate Q values for their specific geometry.
PREREQUISITES
- Understanding of piezoelectric materials, specifically aluminium nitride.
- Familiarity with COMSOL Multiphysics 4.0a and its modeling capabilities.
- Knowledge of eigenvalue problems in mechanical oscillations.
- Basic concepts of quality factor (Q) in resonators.
NEXT STEPS
- Research how to define damping parameters in COMSOL Multiphysics for MEMS resonators.
- Study the calculation of quality factor (Q) using eigenvalues in mechanical systems.
- Explore advanced modeling techniques for contour mode resonators in COMSOL.
- Investigate methods to interpret complex eigenvalues in the context of resonator performance.
USEFUL FOR
Engineers and researchers working on MEMS resonators, particularly those involved in piezoelectric applications and using COMSOL for simulation and modeling.