Does molybdenum react with an Argon plasma powered by RF power?

[Indula]

I'm thinking of implementing a metal disk-like probe in an Argon plasma which is powered by RF. Therefore I need to know a metal that's least reactive with the plasma. Does molybdenum meets this requirement?

 

[trurle]

RF excited argon plasma will sputter molybdenum as well as any other element. In general, heavy elements are more resistant to RF sputtering though. Tungsten is popular if sputtering resistance is required.