Pirani gauge fluctuations in CVD silver coating setup

  • Context: Graduate 
  • Thread starter Thread starter shourie.j
  • Start date Start date
  • Tags Tags
    Vacuum
Join the discussion
Registration is free. Ask a follow-up in this thread, or start your own.
Sign up Log in
1 reply · 3K views
shourie.j
Messages
2
Reaction score
0
Hi Everybody

am using chemical vapour deposition unit for coating silver thin films.
The pirani gauge is not showing readings, t he readings are fluctuating, but the penning gauge shows reading. am not able to make out where is the problem.

1. is the gauge needs to be cleaned due to contamination, or some electronic problem in the display?
2. is the problem with the vacuum pump, since the pressure is not created, the pirani gauge doesn't show the reading?

can you give me a suggestion how to troubleshoot my problem.
 

Discussion

Physics news on Phys.org
Even if the vacuum pump didn't work the gauge should still read some kind of pressure.
Is the chemical you are using reactive with what ever material the gauge is made of.