Troubleshooting Vacuum Gauge Fluctuations in Chemical Vapour Deposition Unit

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SUMMARY

The discussion centers on troubleshooting fluctuations in readings from a Pirani gauge in a chemical vapor deposition (CVD) unit used for coating silver thin films. Users report that while the Pirani gauge shows fluctuating readings, the Penning gauge provides stable readings. Key troubleshooting suggestions include checking for contamination on the gauge, potential electronic issues with the display, and assessing the vacuum pump's functionality, as it may not be creating sufficient pressure for accurate readings. Additionally, the chemical's reactivity with the gauge material is highlighted as a potential factor affecting performance.

PREREQUISITES
  • Understanding of chemical vapor deposition (CVD) processes
  • Familiarity with Pirani and Penning gauge operation
  • Knowledge of vacuum pump functionality and maintenance
  • Awareness of material compatibility in chemical applications
NEXT STEPS
  • Investigate cleaning procedures for Pirani gauges to remove contamination
  • Learn about electronic troubleshooting techniques for gauge displays
  • Research vacuum pump diagnostics and maintenance practices
  • Examine chemical compatibility charts for materials used in gauges
USEFUL FOR

Chemical engineers, technicians operating CVD units, and professionals involved in vacuum technology and gauge maintenance will benefit from this discussion.

shourie.j
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Hi Everybody

am using chemical vapour deposition unit for coating silver thin films.
The pirani gauge is not showing readings, t he readings are fluctuating, but the penning gauge shows reading. am not able to make out where is the problem.

1. is the gauge needs to be cleaned due to contamination, or some electronic problem in the display?
2. is the problem with the vacuum pump, since the pressure is not created, the pirani gauge doesn't show the reading?

can you give me a suggestion how to troubleshoot my problem.
 
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Even if the vacuum pump didn't work the gauge should still read some kind of pressure.
Is the chemical you are using reactive with what ever material the gauge is made of.
 

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