Beam Size Q: Calculate E-Beam Size from 5pA & 40um Pattern

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fredrick08
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Homework Statement



Does anyone know a method or calculation, that can calculate the size of an e-beam? I made a 40 square micron pattern, in approximately 30 seconds with 5pA current if this helps... I have no idea how to estimate the size of the beam tho.
 

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or does anyone know the average size of e-beams?
 

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