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Laser interference lithography

  1. Nov 6, 2016 #1
    Why in lloyd mirror interferometer the mirror must be placed perpendicular to the substrate? Why perpendicular?
    I would really appreciate any answer to this question.
    Thank you so much in advance
  2. jcsd
  3. Nov 6, 2016 #2


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    Staff: Mentor

    Welcome Nasr.

    This is Introductions only. Please post your question in the appropriate forum so it can be answered. :smile:
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