- #1
sam2212
- 9
- 0
Hi
I built penning ions source , works fine on lower vacuum, my issue is in high vacuum 1x10-4 or more, the plasma ignites in the supplied tube to the penning source not inside the chamber. Tried to isolate the gas supply with ceramic inlet, ( feedthrough metal metal => teflon tube=>ceramic =>chamber). Didn't work still plasma in the teflon, tried to ground the inlet and remove the ground still the same. My setup for the ion source:
Anode 5kv
Cathode 4.3kv
Extraction -300v
Gas H 0.5 sccm
Diameter of the feedthrough and teflon 2mm ID.
Any ideas?
Thanks for the help
I built penning ions source , works fine on lower vacuum, my issue is in high vacuum 1x10-4 or more, the plasma ignites in the supplied tube to the penning source not inside the chamber. Tried to isolate the gas supply with ceramic inlet, ( feedthrough metal metal => teflon tube=>ceramic =>chamber). Didn't work still plasma in the teflon, tried to ground the inlet and remove the ground still the same. My setup for the ion source:
Anode 5kv
Cathode 4.3kv
Extraction -300v
Gas H 0.5 sccm
Diameter of the feedthrough and teflon 2mm ID.
Any ideas?
Thanks for the help