Can You Etch Al2O3 Without Etching Al in Microelectronics?

[Excom]

Hi

I have a small challenge. I need to etch aluminium oxide but not aluminum. Does anyone know if this is possible? If yes how?

It is for some microelectronic devices. Hence I can afford etching the aluminum.

 

[hilbert2]

I think some kind of chelating agent such as EDTA might dissolve aluminum oxide but not aluminum.