Silvaco: "simulator has unexpectedly exited with status -1073741819"

[mohamis288]

TL;DR

it is about an error in Silvaco software.
the error is here: "simulator has unexpectedly exited with status -1073741819"
this error occurs when I wanted to make the source and drain implantation.

Hello,

I am simulating the process of NMOS construction. as you know, in order to make the LDD, we need two implantations, one before creating oxide spacer and another after creating oxide spacer. at the last implantation, I am facing an error which is shown in the following image:

I put the code in the attachment too. I have placed thermal annealing after each implantation. Also, the project folder has been changed a couple of time to see the problem is solved or not. energy and dose of implantation has been changed in a wide range, but it did not help. actually, such error has been previously seen in this software but that was when tony plot wanted to come up. in mentioned condition, we just changed the tony plot version in the preference window, and this was solved. but now, this error is not about tony plot, because it even does not complete running Athena codes.

SO, have you any opinion to solve this error?
any help would be appreciated.

BR

 

[Borek]

Probably an access violation error caused by a buffer overrun.

Could be this answer is completely useless, but that's what Visual Studio documentation says about error 0xC0000005.

 

[phyzguy]

I'd suggest contacting Silvaco.