Solution to Ellipsometry Analysis Exercise

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SUMMARY

The discussion centers on determining the deposition order of two thin films, Si3N4 and Si, on an InP substrate using ellipsometry analysis. The two potential orders are Si3N4/Si/InP and Si/Si3N4/InP. Participants are tasked with justifying their choice based on the provided ellipsometric spectra. The analysis requires a solid understanding of optical properties and thin film interference effects.

PREREQUISITES
  • Understanding of ellipsometry principles and techniques
  • Familiarity with thin film deposition methods
  • Knowledge of optical properties of materials, specifically Si3N4 and Si
  • Experience with interpreting ellipsometric data
NEXT STEPS
  • Research the optical properties of Si3N4 and Si for ellipsometry applications
  • Learn about thin film interference and its impact on ellipsometric measurements
  • Study the ellipsometry analysis techniques specific to semiconductor materials
  • Explore case studies involving ellipsometry on InP substrates
USEFUL FOR

Researchers, materials scientists, and engineers involved in thin film technology and optical characterization, particularly those working with semiconductor materials and ellipsometry analysis.

physicist888
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hi all
im trying to solve this exercise of ellipsometry.
given:
the figure show the spectrum of ellipsometry of a twoo thin films Si3N4 and Si deposed on a substrat of INP.
in which order are deposed those thin films: 1- Si3N4/Si/InP
or 2- Si/Si3N4/InP
need justification.


here are the figures in the attachement ( figure 1, 2 and 3)
 

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  • 2.jpg
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