Spin Coating Issues: Cracks on TiCl4 Films

[venus]

Hi everyone!
I'm doing some research on spin coating, my precursor is TiCl4 and I mix it with ethanol, but I have cracks on my films, can anyone help me?

 

[Astronuc]

Is it a Ti-based substrate which you are coating? What is the temperature of the process?

I see that the OP has been asked in the Chemistry forum with some elaboration. So let us address this problem there.

Please do not use multiple posts. Thank you.