Atomic diameter-scale measurements

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DyerMaker
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TL;DR
Can be a length as short as diameter of atom measured out with today's technology?
To be more precise: can we put two objects together so there will be a space with width of one (or some number below 10) atom's diameter(s) between them?
 
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For the question to make sense, you would need the surface of each object to be perfect, following a flat crystal plane. Then, because of quantum mechanics, an atom doesn't have a defined size. By the time the two surfaces would at about the atom-atom distance in the crystal, they would already be consider to be touching each other.
 
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Well, kind of yes.
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Images can be made so measurements can be taken, but with this size it's already no longer simple what will an image show or what will a measurement measure.
 
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