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Best metal mask for BOE/HF etching?

  1. Dec 4, 2015 #1
    I am thinking about using a metal mask for BOE or HF etching because I realize that for normal photoresist, it will gradually peel off and affect my results. I don't know which metal is the best--so far, I see people use Cr/Au, Al, and Ni. Anybody knows which metal will give the best result?
     
  2. jcsd
  3. Dec 10, 2015 #2
    Thanks for the post! This is an automated courtesy bump. Sorry you aren't generating responses at the moment. Do you have any further information, come to any new conclusions or is it possible to reword the post?
     
  4. Dec 11, 2015 #3
    what about using photoresist?
     
  5. Jan 17, 2016 #4
  6. Jan 28, 2016 #5
    Thanks. I am still looking for the best mask that prevents this underetching....
     
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