BST - what is the weird layer at the bottom?

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SUMMARY

The discussion centers on the deposition of BST thin films on platinized silicon substrates using spin casting, resulting in six layers with a final thickness of approximately 500 nm. Post-deposition treatments included annealing at 700 degrees Celsius, which may have contributed to the formation of an anomalous 8 µm thick damaged layer observed in cross-sectional SEM analysis. The presence of this layer is suspected to correlate with lower than expected capacitance in the film. The contributor speculates that oxidation of the platinum substrate could be a factor, despite preventive measures typically employed.

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  • Understanding of BST (Barium Strontium Titanate) thin film deposition techniques
  • Familiarity with spin casting methods for thin films
  • Knowledge of thermal annealing processes and their effects on material properties
  • Experience with scanning electron microscopy (SEM) for material analysis
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  • Research the effects of thermal annealing on BST thin films
  • Investigate the impact of substrate oxidation on thin film properties
  • Learn about advanced SEM techniques for analyzing thin film structures
  • Explore methods to improve capacitance in BST thin films
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This discussion is beneficial for materials scientists, thin film engineers, and researchers focused on dielectric materials and their applications in electronics.

vinven7
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Hello,

I was in the processing of depositing BST thin films on Platinized Silicon substrate from solution using spin casting. Six layers were deposited. Each deposition was followed by 400 celsius for seven minutes and 700 celsius for three minutes. The final film was annealed for an hour at 700 celsius. The grain size seems to be in the range of 40 - 60 nm.
When doing the cross section SEM i find that there is a weird looking highly damaged layer at the bottom of the film that is around 8 um thick. The film itself is around 500 nm thick.
Does anyone have any idea what this layer is? Have you encountered it before?
The film has lower capacitance than expected, I suspect that this might be a reason why.
 

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Sorry... I have absolutely no knowledge of the subject. All that I can think of is oxidation of the platinum in the substrate, but I assume that you have measures in place to prevent that.
 

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