Lithium fluoride (LiF) etching/patterning possible?

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Lithium fluoride (LiF) etching and patterning is a topic of interest, particularly regarding its compatibility with standard lithography techniques similar to SiO2 glass. There is limited literature on LiF etching experiments, raising questions about the feasibility of using dry etch chemistry. While LiF is soluble in HNO3 and H2SO4, this method is discouraged due to the hazardous production of HF. Access to older fabrication facilities may provide alternative etching solutions. Overall, exploring plasma etching could be a viable option for working with LiF materials.
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Does any of you know about Lithium fluoride (LiF) etching/patterning?

I'm wondering if I can pattern a slab of LiF as if it were SiO2 glass: standard lithography, followed by etch. But I haven't found anything in the literature about LiF etching experiments. I'd like to use dry etch chemistry if that's possible.

Thanks
 
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LiF is soluble in HNO3 and H2SO4 but I wouldn't recommend you to do that since produced HF is very dangerous.
 
Do you have access to even an older fab? Plasma etch is pretty catholic in terms of material it will interact with.
 

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