Masters in EE to a PHD in Physics?

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Alkayus
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Good afternoon everyone. I have done a little forum searching, and have not been able to find an answer to my question. I am currently pursuing my B.S. in Physics and am trying to plan out my future a little bit more. I truly love Physics, it is my passion, but I have also come to really love Engineering, in particular EE. I was wondering if it is possible to go to graduate school and get an M.S. in EE and then to move on to a PhD in Physics? Or would it make more sense (and is it possible) to get the PhD in Physics first, then go back to get a M.S. in EE? In EE in particular, the field I would be most interested in, as copied from UVa graduate EE site, would be, "Electrophysics (superconducting devices, device theory and modeling, novel electronic devices)", or "Device Fabrication (MBE, novel materials, lithography, nano-fabrication, electron and ion beam processes, and nano-structures)." As for PhD, I would probably either like to specialize in either Theoretical Physics, or something like Plasma Physics. Career wise, or if that is impossible as a personal path, I am highly interested in research and experimentation. I have considered Engineering Physics (Applied Physics), but I think I would like to get more specialization in each area instead of condensed together. I do apologize if this question comes off as pretty dumb or misguided, and I thank anyone for their help and insight.
 
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As usual it is a matter of whether or not your MS in EE coursework would convince an admissions committee that you are prepared. Going the PhD to MS route is not advisable. It's a step backwards.
 
Why not some graduate work in applied physics? Doing a PhD and then a masters might not even be possible (at least funding-wise) in some places. I am totally sure that you can find a place where research on the topics you mentioned is done in applied physics departments.