What Equipment is Used in VLSI Technology for Wafer Preparation?

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Discussion Overview

The discussion revolves around the equipment used in VLSI technology for wafer preparation, including the materials and processes involved. Participants seek clarification on the necessary equipment and the correctness of their homework related to this topic.

Discussion Character

  • Homework-related
  • Technical explanation
  • Exploratory

Main Points Raised

  • Participants mention silicon as the raw material for wafer preparation, specifying metallurgical grade silicon (MGS) and electron grade silicon (EGS).
  • Equipment listed includes a quartz crucible, crucible supporter, vacuum chamber, heater, and crucible shaft for the melting process.
  • One participant questions whether the listed equipment is sufficient or if additional equipment is needed.
  • Another participant inquires about specific equipment used for oxidation, ion implantation, and diffusion in VLSI technology.

Areas of Agreement / Disagreement

Participants express uncertainty regarding the completeness of their homework and the adequacy of the equipment listed. There is no consensus on whether the provided information is sufficient or correct.

Contextual Notes

Some posts lack clarity on the exact problem statement and relevant materials and processes, which may affect the discussion's focus.

vead
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I need someone to check my home work

wafer preparation

The Attempt at a Solution



material for wafer preparation
raw material - silicon is raw material

MGS metalluragical grade silicon
EGS electron grade silicon wafer making equipment

crucible pure silicon is placed in crucible that is made of quartz
crucible supporter
vacuum chamber crucible is then put in vacuum chamber which is sealed and then filled with some gas
heater

the chamber is heated up to 1500 c to melt silicon
crucible shaft
when silicon is melted nicely the seed is rotated as it slowly pulled out of molten silicon is it all equipment or we need another
 
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The Rules at PF ask that you follow the HW template when asking a HW type question.
 
vead said:
I need someone to check my home work

wafer preparation

The Attempt at a Solution



material for wafer preparation
raw material - silicon is raw material

MGS metalluragical grade silicon
EGS electron grade silicon


wafer making equipment

crucible pure silicon is placed in crucible that is made of quartz
crucible supporter
vacuum chamber crucible is then put in vacuum chamber which is sealed and then filled with some gas
heater

the chamber is heated up to 1500 c to melt silicon
crucible shaft
when silicon is melted nicely the seed is rotated as it slowly pulled out of molten silicon


is it all equipment or we need another


Your post makes no sense, especially without the Homework Help Template that you were provided.

What is the exact problem statement?

What are the relevant materials and processes?

What part of what you posted is your attempt at the solution?
 

Homework Statement



I am not sure that my home work is correct or wrong
someone please check out this

Homework Equations



I have goofle and I read some pdf file


wafer preparation


The Attempt at a Solution





material for wafer preparation
raw material - silicon is raw material

MGS metalluragical grade silicon
EGS electron grade silicon


wafer making equipment

crucible pure silicon is placed in crucible that is made of quartz
crucible supporter
vacuum chamber crucible is then put in vacuum chamber which is sealed and then filled with some gas
heater

the chamber is heated up to 1500 c to melt silicon
crucible shaft
when silicon is melted nicely the seed is rotated as it slowly pulled out of molten silicon

IS it enough to post question on the forum ?
 
What is the exact problem statement from your homework?
 
does anyone know the equipment that is used in vlsi technology

chamber , quartz tube ,furnace

which equipment used for oxidation , ion implantation and diffusion
 

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