What is diffusion and Ion Implantation ?

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SUMMARY

Ion implantation and diffusion are critical processes in wafer fabrication. Ion implantation involves accelerating ions in an electric field and impacting them into silicon wafers to modify their properties. Diffusion, on the other hand, is the process of introducing impurities into the wafer surface by heating, allowing atoms to move and alter conduction properties. Doping refers specifically to the addition of impurities to create N-type or P-type conductors. Understanding these processes is essential for semiconductor device fabrication.

PREREQUISITES
  • Understanding of ion implantation techniques in semiconductor fabrication
  • Knowledge of diffusion processes and their impact on material properties
  • Familiarity with doping methods and their applications in semiconductor technology
  • Basic principles of semiconductor physics and material science
NEXT STEPS
  • Research the specifics of ion implantation techniques and equipment used in semiconductor manufacturing
  • Learn about diffusion profiles and how to control impurity concentration in silicon wafers
  • Explore the annealing process and its importance in repairing lattice damage from ion implantation
  • Investigate the differences between N-type and P-type doping and their applications in electronic devices
USEFUL FOR

This discussion is beneficial for semiconductor engineers, materials scientists, and anyone involved in the fabrication and optimization of semiconductor devices.

vead
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Q1what is ion implantation in wafer fabrication ?
Ion implantation is process by which ion of material accelerated in electric field and impacted into silicon wafer

Q2what is diffusion in wafer fabrication ?
 
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You seem to have answered Q1, what about Q2?
 
Maybe a few videos on the subjects will help.

Ion Implantation 101:

 
Last edited by a moderator:
I need to write Definition

look at this

Ion Implantation is process by which ion of material are accelerated in electric field and placed into wafer

diffusion is process by which impurity introduced into wafer surface

doping - adding impurity into wafer surface

I don't understand what is difference between doping, diffusion and ion Implantation?
 
Doping is adding atoms to a material to modify the conduction properties, for example to make an N type conductor or a P type conductor.

Diffusion is allowing atoms of one material to move by heating it enough that the atoms can move to other positions. One can dope silicon by putting arsenic (or other dopants) on the silicon surface, and putting the silicon wafer in an oven at a temperature that allows the arsenic atoms to diffuse (or move) into the silicon and modify the conduction properties. By choosing the proper temperature and diffusion time it can be possible to control the depth and concentration of the arsenic in a way that is useful for making a desired semiconductor device.

Ion implantation is making a beam of energetic ions and allowing them to hit a surface made of some material -- a material different from the ions. It is used to modify the properties of the material being bombarded. It can also be used to dope semiconductors. The high energy of the ions can damage the lattice structure that is being doped, so it is usually necessary to anneal the semiconductor by heating to allow it to "heal itself". Ion implantation can also be used to harden metal surfaces or change their friction properties by choosing the right type of ions to implant.
 

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