E-PVD Vacuum chamber cleaning maintenance and Care

In summary, the manufacturer doesn't really suggest what to use to clean the chamber walls after each deposition process, but recommends performing a cleaning and maintainence every 6 months.
  • #1
lamejane
11
2
Hello PVD experts out there !

I have question on general e-PVD Vacuum chamber cleaning maintenance and Care

as shown in the pictures below, Thin film material (mostly Metals) is being deposited on a daily basis onto the hardware parts present in our e-PVD vacuum chamber ( such as the quartz crystal shutter, crystal container, Crucible revolver etc.)

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We use a clean room grade vacuum cleaner to clean out the delaminated film from the chamber walls after each deposition process but not all the metal is removed since they adhere quite strongly onto the copper and stainless steel surfaces.

Question to the experts here:

What procedures are normally used to clean the thin-film Metal coating on the hardware parts? Is there a special scotch brite like scrubber (clean room grade) for such purposes?. Would a High power Laser cleaning such as in the link below help?

https://www.cleanlaser.de/wEnglish/produkte/high-power-cl-1000.php

Covering the hardware parts with Al foil is not an option because of possible Al contamination on the wafers being deposited.

Looking forward to your expertise : ).
Thank you .
 

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  • #2
What does the manufacturer's documentation say about periodic maintenance and cleaning? That must be in their user documentation for that equipment, no?
 
  • #3
Not really, they don't really suggest what to use in order to clean but only give a time period of when to perform a cleaning and maintainence
 
  • #4
lamejane said:
Not really, they don't really suggest what to use in order to clean but only give a time period of when to perform a cleaning and maintainence
Hmm, maybe they don't give guidance because they don't control what materials you deposit on the target in the chambers. Maybe try contacting the supplier of the metals that you are depositing. They may have experience and suggestions on the best ways to clean up the interior of the chamber after depositing their metals.
 
  • Like
Likes Tom.G

1. What is E-PVD Vacuum chamber cleaning maintenance and care?

E-PVD (Electron Beam Physical Vapor Deposition) vacuum chamber cleaning maintenance and care refers to the regular cleaning and upkeep of the vacuum chamber used in the PVD process. This includes removing any debris, dust, or residue from the chamber to ensure optimal performance and longevity of the equipment.

2. Why is E-PVD Vacuum chamber cleaning maintenance and care important?

E-PVD vacuum chamber cleaning maintenance and care is important because any buildup or contamination inside the chamber can affect the quality and consistency of the PVD process. It can also lead to equipment malfunctions and reduce the lifespan of the chamber.

3. How often should the E-PVD vacuum chamber be cleaned?

The frequency of E-PVD vacuum chamber cleaning depends on the usage and type of materials being deposited. As a general rule, the chamber should be cleaned after each use or at least once a week for regular usage. For heavy usage or when working with reactive materials, it may need to be cleaned more frequently.

4. What is the recommended method for cleaning the E-PVD vacuum chamber?

The recommended method for cleaning the E-PVD vacuum chamber is to use a combination of solvent cleaning and physical wiping. Solvents such as isopropyl alcohol and acetone can be used to dissolve any residue, while lint-free wipes can be used to physically wipe down the chamber. It is important to avoid using abrasive materials or harsh chemicals that can damage the chamber.

5. Are there any safety precautions to take when cleaning the E-PVD vacuum chamber?

Yes, there are several safety precautions to take when cleaning the E-PVD vacuum chamber. These include wearing appropriate personal protective equipment such as gloves and safety glasses, ensuring proper ventilation in the cleaning area, and following the manufacturer's instructions for handling and disposing of solvents. It is also important to let the chamber cool down before cleaning and to never touch any electrical components inside the chamber.

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