Finding the Right EDS/EDX System for Nano-Analysis

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SUMMARY

The discussion focuses on selecting an appropriate Energy Dispersive Spectroscopy (EDS) or Energy Dispersive X-ray (EDX) system for nano-analysis, specifically for inspecting structures fabricated by Electron Beam Induced Deposition (EBID) techniques with a diameter of 3 nm. The user is evaluating detector options, debating between a 10mm² active area and larger detectors, such as 60mm². The conversation highlights the importance of spatial resolution and the use of Field Emission Scanning Electron Microscopy (FESEM) for imaging nanoparticles, with inquiries about cold cathode types.

PREREQUISITES
  • Understanding of Energy Dispersive Spectroscopy (EDS) and Energy Dispersive X-ray (EDX) systems
  • Familiarity with Electron Beam Induced Deposition (EBID) techniques
  • Knowledge of Field Emission Scanning Electron Microscopy (FESEM) imaging
  • Awareness of detector specifications, including active area sizes
NEXT STEPS
  • Research the specifications and performance of 10mm² vs. 60mm² EDS/EDX detectors
  • Learn about the advantages of using FESEM for nano-particle imaging
  • Investigate the different types of cold cathode electron sources
  • Explore best practices for achieving high spatial resolution in nano-analysis
USEFUL FOR

This discussion is beneficial for materials scientists, electron microscopy specialists, and researchers involved in nano-analysis and fabrication techniques, particularly those considering EDS/EDX systems for high-resolution imaging.

Tempum
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Hi,

I have to look for a new EDS/EDX system for nano-analysis. We want to inspect structures fabricated by EBID technique of 3 nm diameter (we can imagine them with high voltages, from 5kV to 30kV, without any problem): spatial resolution is thus basilar.

What kind of detector should I consider? A 10mm2 active area or a larger one?

I contacted different companies and they are giving me complitely different suggestions (some of them said I should consider 10mm2 detectors, other at least 60mm2 detectors).
 
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Are you using FESEM for imaging the nano particle? What type- cold cathode?
 

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