I am doing a side project with some doped silicon wafers. What precautions should I take when handling wafers? Is it necessary to wear gloves and use deionized water when rinsing the wafers?
Most dopant's are extremely toxic so yes you need to use the proper facility PPE when handling wafers. That usually includes gloves and eye protection at a minimum. Your body is also a large source of contamination (like skin oils) so proper handling devices like wafers tweeters should be used. Ultra pure DI water should always be used as a rinse to reduce surface contamination.