Is ZEP-520A the only e beam resist available on the market?

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SUMMARY

ZEP-520A is a prominent e-beam resist manufactured by ZEON, but it is not the only option available on the market. Other e-beam resists, such as PMMA, are produced by different companies. A comprehensive list of e-beam resists and their corresponding developers can be found on various materials science websites, including Allresist. Users seeking alternatives to ZEP-520A should explore these resources for a broader understanding of available materials.

PREREQUISITES
  • Understanding of e-beam lithography techniques
  • Familiarity with e-beam resist materials
  • Knowledge of developer solutions for e-beam resists
  • Basic research skills to navigate materials science resources
NEXT STEPS
  • Research alternative e-beam resists such as PMMA and their properties
  • Explore the Allresist website for a comprehensive list of e-beam resists and developers
  • Investigate the application of ZEP-520A in various lithography processes
  • Learn about the compatibility of different developers with various e-beam resists
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Materials scientists, semiconductor engineers, and researchers involved in e-beam lithography who are looking for information on e-beam resists and their developers.

anaqavi
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Hi friends,

I need to identify the e beam resist and developer on a sample.

Does anyone know whether ZEP-520A is only manufactured by ZEON? Or in general, is any e beam resist type (e.g. PMMA, ZEP520) the product of one company?
And, is there somewhere a list of materials used as ebeam resist, and a list of the corresponding developers?

Many thanks,
Ali
 
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