Resist adhesion to Borosilicate glass for BOE etching

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SUMMARY

The discussion focuses on the challenges of achieving proper adhesion of photoresist to Borosilicate glass during BOE (Buffered Oxide Etch) etching. The user reports significant peeling of the Shipley 1813 resist after etching with a 6:1 BOE solution. Recommendations include ensuring the glass is thoroughly cleaned and dried, using a piranha clean followed by a bake above 100°C, and considering a more dilute BOE solution (10:1) to improve adhesion.

PREREQUISITES
  • Understanding of BOE (Buffered Oxide Etch) chemistry
  • Familiarity with photoresist materials, specifically Shipley 1813
  • Knowledge of surface preparation techniques, including HMDS application
  • Experience with cleaning methods such as piranha clean
NEXT STEPS
  • Research the effects of piranha cleaning on adhesion properties
  • Explore the use of HMDS for promoting adhesion in photolithography
  • Investigate the impact of different BOE concentrations on etching results
  • Learn about alternative photoresist materials and their adhesion characteristics
USEFUL FOR

This discussion is beneficial for materials scientists, semiconductor fabrication engineers, and anyone involved in photolithography processes, particularly those working with Borosilicate glass and BOE etching techniques.

Yinxiao Li
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Hi all,
I have had a problem in etching Borosilicate glass using BOE (6:1). As etching continues in the channel, the photoresist near the channel gradually peels off and when etching finishes (100nm), the lateral distance of peeled-off resist is big--about 6 microns. Anybody have a great solution for promote the adhesion? Currently I use spinned HMDS to promote adhesion. The resist is Shipley 1813 and I hard bake it for 1hour at 115C before wet etching. Thanks!
 
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In my experience, what you are doing should work. Are you sure the glass is clean and dry before you apply the HMDS? I suggest a piranha clean followed by a bake above 100C before applying the HMDS. Another suggestion is to try a more dilute BOE (10:1). If these don't work then I am stumped.
 

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