Steps that are used to manufacture a microwheel/gear?

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Information on manufacturing microwheels or gears can be found primarily in patents and technical journal articles, which are accessible through local technical libraries. A specific journal article has been highlighted as a useful resource for understanding the process. The size and intended application of the microwheel are crucial factors to consider when seeking detailed manufacturing steps. Engaging with these resources can provide valuable insights into the fabrication techniques. Exploring these avenues will enhance knowledge about microwheel production.
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Does anyone know where I could find the masks and steps that are used to manufacture a microwheel/gear?
 
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engineer23 said:
Does anyone know where I could find the masks and steps that are used to manufacture a microwheel/gear?

I googled MEMS Microwheel, and got some useful hits. It looks like they are mostly patents and technical journal articles, so you might be able to look up the patents, or read the journal articles at your local technical library. Here is one of the journal articles that looks useful:

http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TGJ-41NK8HY-S&_user=10&_rdoc=1&_fmt=&_orig=search&_sort=d&_docanchor=&view=c&_searchStrId=1116212620&_rerunOrigin=google&_acct=C000050221&_version=1&_urlVersion=0&_userid=10&md5=9fa89a90cf081d6836a85c39d128af92

What size microwheel are you wanting to fab? What is the application?
 
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