Steps that are used to manufacture a microwheel/gear?

[engineer23]

Does anyone know where I could find the masks and steps that are used to manufacture a microwheel/gear?

 

[berkeman]

Does anyone know where I could find the masks and steps that are used to manufacture a microwheel/gear?

I googled MEMS Microwheel, and got some useful hits. It looks like they are mostly patents and technical journal articles, so you might be able to look up the patents, or read the journal articles at your local technical library. Here is one of the journal articles that looks useful:

http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TGJ-41NK8HY-S&_user=10&_rdoc=1&_fmt=&_orig=search&_sort=d&_docanchor=&view=c&_searchStrId=1116212620&_rerunOrigin=google&_acct=C000050221&_version=1&_urlVersion=0&_userid=10&md5=9fa89a90cf081d6836a85c39d128af92

What size microwheel are you wanting to fab? What is the application?