Steps that are used to manufacture a microwheel/gear?

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SUMMARY

The discussion focuses on the manufacturing processes for MEMS (Micro-Electro-Mechanical Systems) microwheels or gears. Participants suggest utilizing patents and technical journal articles as primary resources for detailed manufacturing steps and masks. A specific journal article from ScienceDirect is highlighted as a valuable reference for understanding the fabrication techniques involved. The inquiry also prompts further questions regarding the size and application of the desired microwheel.

PREREQUISITES
  • Understanding of MEMS technology
  • Familiarity with technical journal articles
  • Knowledge of patent research methods
  • Basic concepts of microfabrication techniques
NEXT STEPS
  • Research MEMS microwheel fabrication techniques
  • Explore relevant patents on microwheel manufacturing
  • Read the highlighted journal article on ScienceDirect
  • Investigate applications of microwheels in various industries
USEFUL FOR

Engineers, researchers, and students interested in MEMS technology, particularly those focused on microfabrication and the development of specialized gears for various applications.

engineer23
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Does anyone know where I could find the masks and steps that are used to manufacture a microwheel/gear?
 
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engineer23 said:
Does anyone know where I could find the masks and steps that are used to manufacture a microwheel/gear?

I googled MEMS Microwheel, and got some useful hits. It looks like they are mostly patents and technical journal articles, so you might be able to look up the patents, or read the journal articles at your local technical library. Here is one of the journal articles that looks useful:

http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TGJ-41NK8HY-S&_user=10&_rdoc=1&_fmt=&_orig=search&_sort=d&_docanchor=&view=c&_searchStrId=1116212620&_rerunOrigin=google&_acct=C000050221&_version=1&_urlVersion=0&_userid=10&md5=9fa89a90cf081d6836a85c39d128af92

What size microwheel are you wanting to fab? What is the application?
 

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