Textbook recommendations on semiconductor fabrication?

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SUMMARY

The recommended textbook for learning semiconductor fabrication is "Fundamentals of Semiconductor Fabrication" by Gary S. May and Simon Sze. This book covers essential topics including Crystal Growth, Silicon Oxidation, Photolithography, Etching, Diffusion, Ion Implantation, Film Deposition, Process Integration, and IC Manufacturing. It serves as a comprehensive resource for students seeking to understand the complexities of semiconductor processes independently.

PREREQUISITES
  • Basic understanding of semiconductor physics
  • Familiarity with photolithography techniques
  • Knowledge of chemical etching processes
  • Awareness of ion implantation methods
NEXT STEPS
  • Study the principles of Crystal Growth in semiconductor materials
  • Explore advanced techniques in Photolithography
  • Research the impact of Diffusion on semiconductor properties
  • Learn about Process Integration in IC Manufacturing
USEFUL FOR

This discussion is beneficial for students, educators, and professionals in the semiconductor industry, particularly those involved in fabrication processes and materials science.

Jayalk97
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Hey friends, taking a class on semiconductor fabrication and my professor both can't teach and doesn't use a textbook. I'm going to take it upon myself to learn the material independently, so can anyone recommend a good textbook on the subject? Thanks in advance!
 
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Fundamentals of Semiconductor Fabrication
Book by Gary S. May and Simon Sze

Book Contains :-

1. Introduction
2. Crystal Growth
3. Silicon Oxidation
4. Photolithography
5. Etching
6. Diffusion
7. Ion Implantation
8. Film Deposition
9. Process Integration
10. IC Manufacturing.
 

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