Textbook recommendations on semiconductor fabrication?

[Jayalk97]

Hey friends, taking a class on semiconductor fabrication and my professor both can't teach and doesn't use a textbook. I'm going to take it upon myself to learn the material independently, so can anyone recommend a good textbook on the subject? Thanks in advance!

 

[steve smiths]

Hi you can check

Fundamentals of Semiconductor Fabrication
Book by Gary S. May and Simon Sze

Book Contains :-

1. Introduction
2. Crystal Growth
3. Silicon Oxidation
4. Photolithography
5. Etching
6. Diffusion
7. Ion Implantation
8. Film Deposition
9. Process Integration
10. IC Manufacturing.