Textbook recommendations on semiconductor fabrication?

AI Thread Summary
A user is seeking recommendations for a textbook on semiconductor fabrication due to dissatisfaction with their professor's teaching and lack of a textbook. A suggested resource is "Fundamentals of Semiconductor Fabrication" by Gary S. May and Simon Sze. This book covers essential topics including crystal growth, silicon oxidation, photolithography, etching, diffusion, ion implantation, film deposition, process integration, and integrated circuit manufacturing, making it a comprehensive guide for independent study in semiconductor fabrication.
Jayalk97
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Hey friends, taking a class on semiconductor fabrication and my professor both can't teach and doesn't use a textbook. I'm going to take it upon myself to learn the material independently, so can anyone recommend a good textbook on the subject? Thanks in advance!
 
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Fundamentals of Semiconductor Fabrication
Book by Gary S. May and Simon Sze

Book Contains :-

1. Introduction
2. Crystal Growth
3. Silicon Oxidation
4. Photolithography
5. Etching
6. Diffusion
7. Ion Implantation
8. Film Deposition
9. Process Integration
10. IC Manufacturing.
 

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