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What is "Proximity Effect Control" in ebeam lithography?

  1. Jul 9, 2014 #1
    Hello all,

    Can somebody explain to me what PEC (proximity effect control) means in nanofabrication?

  2. jcsd
  3. Jul 29, 2014 #2
    I'm sorry you are not finding help at the moment. Is there any additional information you can share with us?
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