Galileo might indeed edge Newton in that he had both the broad insights like relativity and inertia, and also did simple experiments that proved them. Also, how much further might he have got if not restricted by the church?Galileo obviously, for mathematicizing science. Everything Newton, Einstein & all the rest afterwards was an example of Galileo's philosophy & nothing more. Descartes gets an honourable mention for having simialr views.
QM was a bigger revolution, but the problem is then picking one of many.
With relativity, it is the other way round - an obvious candidate, but arguments that others would have got there too. On the other hand, Einstein did do a complete job, did suggests the simple tests, and also did do major early work in QM. So maybe Einstein over Galileo in the end.
So a big three in Galileo, Newton and Einstein.
Darwin and Boltzmann in the same league. No way. Nor Feynman, Descartes, etc. Merely demi-gods!