- #1
harry_harrin
- 5
- 0
Hi all,
I'm looking at the ALD process for a uni project and could do with some clarification on a couple of points. Does anyone have any idea what the effect of non-uniform substrate heating would be? Would it harm the chemical bonding and cause ablation? I can't seem to find out from anywhere what an acceptable temp. variation would be. Very confused!
I'm looking at the ALD process for a uni project and could do with some clarification on a couple of points. Does anyone have any idea what the effect of non-uniform substrate heating would be? Would it harm the chemical bonding and cause ablation? I can't seem to find out from anywhere what an acceptable temp. variation would be. Very confused!