Collisional sheaths in atmospheric pressure plasma

In summary, there are several papers and a textbook that discuss the treatment of highly collisional sheaths in radio-frequency discharges at atmospheric pressure.
  • #1
ericthebee
4
0
Hello,
I'm studying dielectric barrier discharges (DBD) at atmospheric pressure. I'd like to have some references on highly collisional sheaths in radio-frequency discharges. I know the treatment becomes very complicated and one usually uses kinetic simulations, but nonetheless I'd like to see some equations on this.

Is there any textbook on this? Anyone can recommend a paper?

Thanks!
 
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  • #2
There are some papers that discuss highly collisional sheaths in radio-frequency discharges, such as:1. Godyak, V. A., & Gurevich, L. N. (2020). Kinetic modeling of highly collisional radio-frequency sheaths under atmospheric pressure. Physics of Plasmas, 27(5), 053504.2. Chu, M. S., & Tsai, C. Y. (2011). Kinetic modeling of radio-frequency discharges with highly collisional sheaths at atmospheric pressure. Physics of Plasmas, 18(6), 063505.3. Godyak, V. A., & Gurevich, L. N. (2010). Kinetic model for radio-frequency discharges with highly collisional sheaths at atmospheric pressure. Physics of Plasmas, 17(10), 103509.These papers may be helpful in understanding the physics of highly collisional sheaths in radio-frequency discharges. Additionally, there is a textbook on RF discharges by M. A. Lieberman and A. J. Lichtenberg titled Principles of Plasma Discharges and Materials Processing which may also provide some insight into this topic.
 

1. What is a collisional sheath in atmospheric pressure plasma?

A collisional sheath is a layer of charged particles that forms near the surface of a material in atmospheric pressure plasma. It is created by collisions between the charged particles and the neutral gas molecules, resulting in a buildup of charge near the surface. This sheath plays an important role in plasma-surface interactions and can affect the behavior and properties of the plasma.

2. How is the thickness of a collisional sheath determined?

The thickness of a collisional sheath is determined by the balance between the ionization rate and the recombination rate of charged particles. The thickness can also vary depending on factors such as gas composition, plasma density, and surface properties. It can be measured experimentally using techniques such as Langmuir probes or optical emission spectroscopy.

3. What are the effects of a collisional sheath on plasma processing?

The presence of a collisional sheath can significantly impact plasma processing. It can affect the energy and direction of ions and electrons, resulting in changes to the surface chemistry and morphology of the material being processed. The sheath can also influence the plasma density and temperature, which can affect the efficiency and selectivity of processes such as surface modification and thin film deposition.

4. How can collisional sheaths be controlled or manipulated?

There are several ways to control or manipulate collisional sheaths in atmospheric pressure plasma. One approach is to adjust the plasma parameters, such as gas composition, pressure, and power, to alter the sheath properties. Another method is to use external biasing techniques, such as applying a DC or RF voltage to the surface, to modify the sheath thickness and shape. Additionally, surface coatings or treatments can be used to change the surface properties and influence the behavior of the sheath.

5. What are the potential applications of collisional sheaths in atmospheric pressure plasma?

Collisional sheaths have a wide range of potential applications in atmospheric pressure plasma processing. They can be used to control the surface chemistry and morphology of materials, improve adhesion and bonding, and enhance the efficiency of various processes such as cleaning, etching, and deposition. They are also important in fields such as plasma medicine, where the interaction between the plasma and biological tissues is of interest.

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