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Any recommendation about Microelectronic Fabrication?

  1. Feb 28, 2007 #1
    Hi, dear all:
    I am a newbie in EE, now I am studying some courses related to IC fabrication and MEMS. I have the book : "The Science and Engineering of Microelectronic Fabrication" by Stephen A. Campbell. I am really wanted to know are there any online tutorial materials and discussion forums for me?
    Thanks in advance!
  2. jcsd
  3. Mar 1, 2007 #2


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    For online tutorials, just use your favorite http://www.interq.or.jp/japan/se-inoue/e_search.htm [Broken] and plug in key words like: "Integrated circuit", fabrication, & tutorial. I tried it and saw some really useful URLs.
    Last edited by a moderator: May 2, 2017
  4. Mar 3, 2007 #3
    Have you looked to see what MIT's OpenCourseWare ( http://ocw.mit.edu ) has?
  5. Mar 4, 2007 #4
    there is nothing about that!
  6. Mar 4, 2007 #5
    @ walkingwater

    Hi!!! Go through the MIT OCW site there is lots of information there.

    Fabrication and Microelectronic devices are dwelt upon quite nicely.
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