Any recommendation about Microelectronic Fabrication?

[walkinginwater]

Hi, dear all:
I am a newbie in EE, now I am studying some courses related to IC fabrication and MEMS. I have the book : "The Science and Engineering of Microelectronic Fabrication" by Stephen A. Campbell. I am really wanted to know are there any online tutorial materials and discussion forums for me?
Thanks in advance!

 

[Ouabache]

For online tutorials, just use your favorite http://www.interq.or.jp/japan/se-inoue/e_search.htm [Broken] and plug in key words like: "Integrated circuit", fabrication, & tutorial. I tried it and saw some really useful URLs.

 

[vsage]

Have you looked to see what MIT's OpenCourseWare ( http://ocw.mit.edu ) has?

 

[walkinginwater]

there is nothing about that!

 

[embeddeduser]

@ walkingwater

Hi! Go through the MIT OCW site there is lots of information there.

Fabrication and Microelectronic devices are dwelt upon quite nicely.