Can You Etch Al2O3 Without Etching Al in Microelectronics?

Thread starter Excom
Start date May 29, 2014
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Etching

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Etching aluminum oxide without affecting the underlying aluminum is a specific challenge in microelectronics. The discussion centers on the feasibility of using chelating agents like EDTA to selectively dissolve aluminum oxide while preserving the aluminum substrate. Participants explore various chemical methods and emphasize the need for precision in the etching process to avoid damaging the aluminum layer. The conversation highlights the importance of understanding the chemical interactions involved in etching aluminum oxide and suggests that careful experimentation may be necessary to achieve the desired results.

May 29, 2014

Excom

Hi

I have a small challenge. I need to etch aluminium oxide but not aluminum. Does anyone know if this is possible? If yes how?

It is for some microelectronic devices. Hence I can afford etching the aluminum.

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May 30, 2014

hilbert2

Science Advisor

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I think some kind of chelating agent such as EDTA might dissolve aluminum oxide but not aluminum.

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