The NASA Glenn Chemical Species Gas Sensors Team is developing gas sensing technology for aeronautic and space applications. The same technology also has a variety of commercial applications. The sensors presently being developed will allow the detection of hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide in a variety of ambient gas conditions and temperatures. The sensors are microfabricated and micromachined using Microelectromechanical Systems (MEMS) based technology to minimize size, weight, and power consumption. Nanomaterials are used to improve the sensor response and stability. A temperature detector and a heater are also included in the structure to allow stable sensor operation at a variety of temperatures. The sensor technology development also depends on the use of nanomaterials and [Silicon carbide (SiC)] as an electronic semiconductor. Mass fabrication of the sensors using silicon-processing technology is envisioned to minimize the cost per sensor.