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Conversion of EDX linescans to concentration

  1. Sep 15, 2009 #1
    I have recorded cross sections of a surface layer on a substrate in a scanning electron microscope (SEM), and took EDX (energy dispersive x-ray spectroscopy) linescans across the layer.

    These are typically given in counts or cts per second.

    Now, I know the average thickness of the layer from SEM and image analysis, and know the total area, so I know the volume, but I need to know how many moles or how many grams of the atoms I deposited I have to get a concentration c = g/cm^3 or c,mol = mol/cm^3. How can I convert the EDX linescans into grams or mols?

    Thanks
     
  2. jcsd
  3. Oct 1, 2009 #2
    anyone kindly has an idea?
     
  4. Oct 1, 2009 #3

    ZapperZ

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    I wish I can help, but I only use the EDX spectrum when I use the SEM only to identify the elements present, rather than to make quantitative determination of the concentration. I hope someone else who is familiar with such technique can respond.

    I have a paper that may have either some technique, or at least make a reference to it, on doing such a determination. Check it out and see if it might help.

    http://www.jneurosci.org/cgi/reprint/18/17/6623.pdf

    Zz.
     
  5. Oct 5, 2009 #4
    Last edited by a moderator: May 4, 2017
  6. Oct 6, 2009 #5

    ZapperZ

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    Actually, I'm not. But they were some of the papers I read when I was about to learn the physics of SEM.

    Zz.
     
    Last edited by a moderator: May 4, 2017
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