Dielectric loss of SiO2 layers.

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    Dielectric Loss
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Discussion Overview

The discussion centers on the dielectric loss values of very thin SiO2 layers in the high frequency range (GHz), particularly in the context of metal-oxide-semiconductor (MOS) applications. Participants seek references and data regarding these values and explore related materials.

Discussion Character

  • Exploratory
  • Technical explanation
  • Debate/contested

Main Points Raised

  • Some participants inquire about the availability of dielectric loss values for thin SiO2 layers at GHz frequencies, expressing difficulty in finding reliable references.
  • One participant mentions alumina as a material used in high-quality radomes at GHz frequencies, suggesting that its losses in thin film form may be negligible, referencing the Antenna Designers Handbook.
  • Another participant acknowledges a mistake in referencing alumina but speculates that its properties might be similar to those of SiO2.
  • It is noted that the dielectric loss of SiO2 can vary significantly based on the deposition method and fabrication process, with a participant suggesting that "normal" SiO2 deposited via e-beam might have a loss tangent around 10^-4.
  • There is a comparison made between alumina and SiO2, with the suggestion that alumina may exhibit better dielectric properties, although this is also dependent on deposition methods.

Areas of Agreement / Disagreement

Participants express uncertainty regarding the specific dielectric loss values for SiO2 and acknowledge that these values can vary based on several factors. There is no consensus on the exact values or the best references to consult.

Contextual Notes

The discussion highlights the dependence of dielectric loss on the deposition method and fabrication processes, indicating that values may not be readily available in standard tables and may require specific foundry specifications.

kpsr
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Hello everyone,

Where can i get dielectric loss values of very thin SiO2 layers (nm) at high frequency range (GHz).?
i.e SiO2 oxide layer dielectric loss of MOS (metal-oxide-semiconductor).
I searched a lot on net but i didn't find any useful result, any reference is greatly appreciated.
 
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kpsr said:
Hello everyone,

Where can i get dielectric loss values of very thin SiO2 layers (nm) at high frequency range (GHz).?
i.e SiO2 oxide layer dielectric loss of MOS (metal-oxide-semiconductor).
I searched a lot on net but i didn't find any useful result, any reference is greatly appreciated.
Alumina is used as a high quality radome at GHz frequencies on spacecraft etc so I am sure the losses of a thin film will be quite negligible. Antenna Designers Handbook, (Vol 1 or 2) Edited by Rudge, I think talks about alumina as a window material.
 
tech99 said:
Alumina is used as a high quality radome at GHz frequencies on spacecraft etc so I am sure the losses of a thin film will be quite negligible. Antenna Designers Handbook, (Vol 1 or 2) Edited by Rudge, I think talks about alumina as a window material.
Apologies, wrong material (!) but I suspect it is very similar.
 
It depends quite a lot on how the SiO2 is deposited and the rest of the fabrication process so it is not something you can easily look up in a table, it is more the kind of thing you might find in a foundry spec sheet. "Normal" SiO2 deposited using e.g. e-beam is quite lossy. I'd say 10^-4 would be a reasonable guess for the loss tangent.

tech99 said:
Apologies, wrong material (!) but I suspect it is very similar.

Alumina can easily be an order of magnitude better than SiO2, but again it will depend on how it is deposited,
 

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