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How much the dielectric loss tangent of 10 nm thick SiO2 ?

  1. Oct 25, 2014 #1
    How much the dielectric loss tangent of 10 nm thick SiO2 at 1Ghz ?
    I am studying the MOSFETs i want to know the the dielectric loss tangent of SiO2 dielectric at such manometer thickness, So if any body know any reference about it Please let me know..
     
  2. jcsd
  3. Oct 31, 2014 #2
    Thanks for the post! Sorry you aren't generating responses at the moment. Do you have any further information, come to any new conclusions or is it possible to reword the post?
     
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