Etchant that attacks Fe and not attack Al

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Discussion Overview

The discussion centers around the challenge of finding an etchant that selectively attacks iron (Fe) without affecting aluminum (Al) in a layered material structure. The context involves microfabrication techniques and the specific requirements of etching processes.

Discussion Character

  • Exploratory
  • Technical explanation
  • Debate/contested

Main Points Raised

  • One participant seeks an etchant that can selectively etch Fe while leaving Al intact.
  • Another participant notes that existing lists of microfabrication etchants do not include any that etch iron without also attacking aluminum.
  • A participant inquires about the possibility of using a lift-off process instead of etching to remove the Fe layer.
  • The original poster explains that a lift-off process is not feasible due to the lengthy deposition time required for each layer using an e-beam evaporator.

Areas of Agreement / Disagreement

Participants generally agree on the difficulty of finding a suitable etchant, but multiple competing views remain regarding the feasibility of alternative methods like lift-off.

Contextual Notes

The discussion highlights limitations in available etchants and the specific constraints imposed by the deposition method used, which may affect the choice of etching techniques.

Si14
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Dear all:

I have two layers: 1-2nm of Fe on top of 10-30 nm of Al. I am going to etch some portions of the top Fe layer.
So I am looking for an etchant that attacks Fe and not Al.
Can you help me?

Regards.
 
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Hi Si14, I was looking through some lists of microfabrication etchants, and unfortunately there's nothing that etches iron without also attacking aluminum.
 
Thank you very much Mapes. I am still looking for that to find one etchant and there might be a good etchant. Other friends have any suggestion?

Regards.
 
Is there any particular reason for why you can't use a lift-off process to remove the Fe?
 
f95toli said:
Is there any particular reason for why you can't use a lift-off process to remove the Fe?

Good question.
The reason is that I use e-beam evaporator to deposit and it takes about 4 hours for each deposition. So I wanted to deposit all layers at once.
 

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