Etchant that attacks Fe and not attack Al

[Si14]

Dear all:

I have two layers: 1-2nm of Fe on top of 10-30 nm of Al. I am going to etch some portions of the top Fe layer.
So I am looking for an etchant that attacks Fe and not Al.
Can you help me?

Regards.

 

[Mapes]

Hi Si14, I was looking through some lists of microfabrication etchants, and unfortunately there's nothing that etches iron without also attacking aluminum.

 

[Si14]

Thank you very much Mapes. I am still looking for that to find one etchant and there might be a good etchant. Other friends have any suggestion?

Regards.

 

[f95toli]

Is there any particular reason for why you can't use a lift-off process to remove the Fe?

 

[Si14]

Is there any particular reason for why you can't use a lift-off process to remove the Fe?

Good question.
The reason is that I use e-beam evaporator to deposit and it takes about 4 hours for each deposition. So I wanted to deposit all layers at once.