FREEMAN ION SOURCE Design and Optimization for Increased Beam Density

[david allen]

Hi
I am searching on freeman ION SOURCE for my BS thesis. I have lots of problem about the material of the FREEMAN ION SOURCE and sizes of all the part to have the best design and better beam density. I need some details. Any help would be appreciated.

 

[Astronuc]

There are several textbooks on Ion Sources, but they tend to be rather expensive.

8. Freeman and Bernas Ion Sources (Marvin Farley, Peter Rose, and Geoffrey Ryding).

8.1 Introduction.

8.2 The Freeman Ion Source.

8.3 The Bernas Ion Source.

8.4 Further Discussion of the Source Plasma.
8.4.1 Plasma and Sheath Potentials.
8.4.2 Effect of Sputtering on the Plasma.
8.4.3 Ion Heating of the Cathode and Anticathode in the Bernas Source.
8.4.4 Current Balance in the Freeman Source.
8.4.5 Current Balance in the Bernas Source.

8.5 Control Systems.
8.5.1 Freeman and Bernas Controls.
8.5.2 Bernas Indirectly Heated Cathode.

8.6 Lifetime and Maintenance Issues.
8.6.1 Use of BF3.
8.6.2 Use of PH3, AsH3, P4, and As4.
8.6.3 Use of Sb, Sb2O3, and SbF3.
8.6.4 Use of SiF4 and GeF4.
8.6.5 General Guidelines for the Use of Other Organic and Inorganic Compounds.
8.6.6 Electrode Cleaning and Maintenance.
8.6.7 Insulator Cleaning and Maintenance.

from The Physics and Technology of Ion Sources, 2nd, Revised and Extended Edition, Ian G. Brown (Editor), Wiley, October 2004 - US$300
http://www.wiley.com/WileyCDA/WileyTitle/productCd-3527404104,descCd-tableOfContents.html

Sample from text - http://books.google.com/books?id=jOlKdGPBpD0C&pg=PA134&

Paper - "Ion Sources For Commercial Ion lmplanter Applications" mentions Freeman sources
http://accelconf.web.cern.ch/accelconf/p91/PDF/PAC1991_2088.PDF

 

[david allen]

I really appreciate for your replay. I have got this book that is great but it did not mention for sort of details such as what is the best length of FILAMENT or the best distance between chamber and filament and the best element for using in arc chamber.
thank you