How to add HZO as an Oxide gate in Silvaco TCAD?

[mhr0003]

TL;DR Summary

Help me add hafnium zirconium oxide in Silvaco

I am trying to simulate a Gate-All-Around FET in Silvaco TCAD for my thesis but I can't figure out how to add HZO (Hf_0.5Zr_0.5O₂). I would really appreciate it if anyone could help me with the code for HZO or help me in any other way.
Thank you.

 

[phyzguy]

Here are some examples from Silvaco: