- #1
lamejane
- 11
- 2
- TL;DR Summary
- Solution to get rid of water in a vacuum chamber
Hello all ,
our PVD chamber experienced a water leakage from the cruible revoler area and unfortunately we are no longer able to achieve a stable Base pressure ( ~10e-6 mbar)
We do not have the option of a bake out. Is there any other way to get rid of water in the chamber ?
Ofcourse the water has been wiped out dry using clean room wipes, but i suspect there is still some monolayers of water adhering strongly to the chamber surface. Would repeated Nitrogen flusing help in getting rid of the water molecules? ?
Thanks !
Rgds
Jane
our PVD chamber experienced a water leakage from the cruible revoler area and unfortunately we are no longer able to achieve a stable Base pressure ( ~10e-6 mbar)
We do not have the option of a bake out. Is there any other way to get rid of water in the chamber ?
Ofcourse the water has been wiped out dry using clean room wipes, but i suspect there is still some monolayers of water adhering strongly to the chamber surface. Would repeated Nitrogen flusing help in getting rid of the water molecules? ?
Rgds
Jane