How to add HZO as an Oxide gate in Silvaco TCAD?

Join the discussion
Registration is free. Ask a follow-up in this thread, or start your own.
1 reply · 2K views
mhr0003
Messages
1
Reaction score
0
TL;DR
Help me add hafnium zirconium oxide in Silvaco
I am trying to simulate a Gate-All-Around FET in Silvaco TCAD for my thesis but I can't figure out how to add HZO (Hf0.5Zr0.5O2). I would really appreciate it if anyone could help me with the code for HZO or help me in any other way.
Thank you.
 
Engineering news on Phys.org