What materials and devices require manufacturing in a vacuum environment?

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SUMMARY

Manufacturing in a vacuum environment is essential for various materials and devices, particularly superconductors, integrated circuits (IC), and microelectromechanical systems (MEMS). Key processes such as sputtering, evaporation, plasma ashing, and reactive ion etching benefit from a near-vacuum to facilitate material transfer and chemical reactions. Additionally, the production of refractory alloys, including zirconium (Zr) and titanium (Ti), necessitates vacuum conditions to prevent contamination from oxygen and nitrogen, which adversely affect their properties. Vacuum casting and electron beam welding are also critical processes that require a vacuum environment.

PREREQUISITES
  • Understanding of vacuum technology and its applications
  • Familiarity with integrated circuit (IC) manufacturing processes
  • Knowledge of microelectromechanical systems (MEMS) fabrication
  • Awareness of materials science, particularly regarding refractory alloys
NEXT STEPS
  • Research vacuum deposition techniques such as sputtering and evaporation
  • Learn about plasma processing methods like plasma ashing and reactive ion etching
  • Explore the properties and applications of refractory alloys in manufacturing
  • Investigate the principles of electron beam welding in vacuum environments
USEFUL FOR

This discussion is beneficial for materials scientists, manufacturing engineers, and professionals involved in semiconductor fabrication and advanced materials processing.

aquitaine
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I heard somewhere that some materials and devices need to be manufactured in a vacuum environment. I heard superconductors was one of them, but I'm wondering what else there is?
 
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Many integrated circuit (IC) and microelectromechanical systems (MEMS) manufacturing steps use a near-vacuum. It's convenient to have no air in the way if you want to transfer material from a source to the IC silicon wafer (e.g., sputtering, evaporation). A near-vacuum also makes it possible to strike an electrical plasma, which can drive certain desirable chemical reactions (e.g., plasma ashing, reactive ion etching).
 
Melting (for ingot production) of refractory alloys is done in a vacuum, as well as vacuum casting, and electron beam welding.

For refractory alloys like those of Zr, Ti, and others cannot be fabricated in air because they absorb oxygen and nitrogen, which can have a deleterious effect on corrosion and mechanical behavior. In addition, hydrogen cannot be present.
 
So it sounds like quite a few applications require it. Interesting.
 

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